Title:
【発明の名称】コールドウォール形成膜処理装置
Document Type and Number:
Japanese Patent JP3326538
Kind Code:
B2
Inventors:
Hideki Lee
Tomihiro Yonenaga
Tomihiro Yonenaga
Application Number:
JP30925892A
Publication Date:
September 24, 2002
Filing Date:
October 23, 1992
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
C23C16/00; C23C16/44; H01L21/205; H01L21/285; H01L21/31; (IPC1-7): H01L21/205; C23C16/44
Domestic Patent References:
| JP347968A | ||||
| JP1231936A | ||||
| JP3243688A | ||||
| JP3252130A | ||||
| JP4280987A | ||||
| JP458530A | ||||
| JP4181734A |
Attorney, Agent or Firm:
Masataka Sasaki