Title:
【発明の名称】集積回路の試験・修復装置
Document Type and Number:
Japanese Patent JP3330382
Kind Code:
B2
Abstract:
In this device, the ion beam used for the repair forms at the same time the particle beam used for the test process and a single beam generating device is provided for generating this beam. Testing and repairing in one arrangement without requiring a change in the position of the integrated circuit to be examined reduces the time and cost expenditure
Inventors:
Yasuo Tokunaga
Jurgen flosien
Jurgen flosien
Application Number:
JP21561691A
Publication Date:
September 30, 2002
Filing Date:
August 27, 1991
Export Citation:
Assignee:
Advantest Corporation
International Classes:
G01Q70/00; G01R31/302; G01R31/303; G01R31/26; H01L21/66; H01L21/82; H01L23/525; (IPC1-7): H01L21/66; G01R31/26; H01L21/82
Domestic Patent References:
| JP63116443A | ||||
| JP231136U | ||||
| JP6318763U |
Attorney, Agent or Firm:
Akihiro Ryuka