Title:
【発明の名称】試料検査装置および方法
Document Type and Number:
Japanese Patent JP3334750
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To detect, correctly and rapidly, a layer thickness of an insulating layer positioned at a bottom part of a minute vertical hole, by detecting a current penetrating a rear surface of a sample to be inspected where an electron beam is applied to its surface by a detection electrode, and measuring the detected current. SOLUTION: An xy stage 110 is provided with a detection electrode 120 on the surface, and the detection electrode 120 is provided on the rear surface of a sample 101 to be inspected which is held with the xy stage 110, and the detection electrode 120 is connected to an ammeter 121. When an electron beam is applied to the surface of the sample 101 from an electron gun 111, the detection electrode 120 detects the current penetrating the rear surface of the sample 101 and the ammeter 121 measures the current detected by the detection electrode 120. Thus, the layer thickness of an insulating layer positioned at the bottom part of a minute vertical hole of the sample 101 is detected correctly and rapidly from the current.
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Inventors:
Keizo Yamada
Application Number:
JP30008598A
Publication Date:
October 15, 2002
Filing Date:
October 21, 1998
Export Citation:
Assignee:
NEC
International Classes:
H01L21/66; G01R31/302; (IPC1-7): H01L21/66; G01R31/302
Domestic Patent References:
| JP1235244A |
Attorney, Agent or Firm:
Nobuyuki Kaneda (2 others)