Title:
【発明の名称】洗浄・乾燥処理装置及び洗浄・乾燥処理方法
Document Type and Number:
Japanese Patent JP3341148
Kind Code:
B2
Inventors:
Yuji Kamikawa
Application Number:
JP36431597A
Publication Date:
November 05, 2002
Filing Date:
December 19, 1997
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/304; (IPC1-7): H01L21/304
Domestic Patent References:
| JP7335601A | ||||
| JP6283496A | ||||
| JP6283497A | ||||
| JP6120197A |
Attorney, Agent or Firm:
Kikuhiko Nakamoto