Title:
【発明の名称】ポリッシング装置
Document Type and Number:
Japanese Patent JP3341258
Kind Code:
B2
Inventors:
Katsuya Okumura
Toru Watanabe
Riichiro Aoki
Hiroyuki Yano
Masako Kodera
Atsushi Shigeta
Yu Ishii
Norio Kimura
Masayoshi Hirose
Manabu Tsujimura
Toru Watanabe
Riichiro Aoki
Hiroyuki Yano
Masako Kodera
Atsushi Shigeta
Yu Ishii
Norio Kimura
Masayoshi Hirose
Manabu Tsujimura
Application Number:
JP34116192A
Publication Date:
November 05, 2002
Filing Date:
November 27, 1992
Export Citation:
Assignee:
Toshiba Corporation
Ebara Corporation
Ebara Corporation
International Classes:
B24B37/04; B24B37/30; B24B37/32; H01L21/304; (IPC1-7): B24B37/04; H01L21/304
Domestic Patent References:
| JP57157453U |
Attorney, Agent or Firm:
Takashi Kumagai (1 outside)