Title:
【発明の名称】プラズマ損傷の検査方法、およびその検査素子
Document Type and Number:
Japanese Patent JP3341694
Kind Code:
B2
More Like This:
Inventors:
Go Noguchi
Application Number:
JP71199A
Publication Date:
November 05, 2002
Filing Date:
January 05, 1999
Export Citation:
Assignee:
NEC
International Classes:
H01L21/302; H01L21/3065; H01L21/66; H01L29/78; H05H1/46; (IPC1-7): H01L21/66; H01L21/3065; H01L29/78; H05H1/46
Domestic Patent References:
| JP1079407A | ||||
| JP11265918A | ||||
| JP1084023A |
Attorney, Agent or Firm:
Hiroo Suzuki