Title:
【発明の名称】高α型窒化ケイ素の製造方法
Document Type and Number:
Japanese Patent JP3344663
Kind Code:
B2
Inventors:
Yasuhito Fushii
Kei Isozaki
Kei Isozaki
Application Number:
JP23159793A
Publication Date:
November 11, 2002
Filing Date:
September 17, 1993
Export Citation:
Assignee:
DENKI KAGAKU KOGYO KABUSHIKI KAISHA
International Classes:
C01B21/068; C04B35/626; (IPC1-7): C01B21/068; C04B35/626
Domestic Patent References:
| JP5650170A | ||||
| JP6183604A | ||||
| JP61158804A | ||||
| JP63147807A |