Title:
【発明の名称】基板処理装置
Document Type and Number:
Japanese Patent JP3352865
Kind Code:
B2
Inventors:
Kunio Yamada
Application Number:
JP30625095A
Publication Date:
December 03, 2002
Filing Date:
November 24, 1995
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G02F1/1333; F24F7/06; G03F7/20; H01L21/02; H01L21/027; H01L21/304; (IPC1-7): H01L21/304; H01L21/02; H01L21/027
Domestic Patent References:
| JP7201798A | ||||
| JP58199349A | ||||
| JP7263172A | ||||
| JP5129269A | ||||
| JP548330U |
Attorney, Agent or Firm:
Etsushi Kotani (3 outside)