Title:
【発明の名称】球状物の表面検査装置
Document Type and Number:
Japanese Patent JP3357317
Kind Code:
B2
Inventors:
Shinji Yamada
Mitsuhiro Minami
Norio Taneda
Mitsuhiro Minami
Norio Taneda
Application Number:
JP14621199A
Publication Date:
December 16, 2002
Filing Date:
May 26, 1999
Export Citation:
Assignee:
Kanebo Co., Ltd.
International Classes:
G01N21/88; (IPC1-7): G01N21/88
Domestic Patent References:
| JP7159332A | ||||
| JP55149046A |