Title:
【発明の名称】感光性ガラス基板を利用したマイクロ構造物の製造方法
Document Type and Number:
Japanese Patent JP3360065
Kind Code:
B2
Abstract:
The present invention relates to a method of manufacturing a microstructure such as a barrier lib or a spacer formed at an internal space between two flat panels constructing a flat panel display and, in particular, to a method of manufacturing a microstructure using a photosensitive glass substrate. The method of manufacturing a microstructure in accordance with the present invention includes the steps of preparing a photosensitive glass substrate, forming a mask pattern having a light transmission unit and a shading unit on the photosensitive glass substrate, exposing the photosensitive glass substrate, heat-treating the photosensitive glass substrate, and etching an unexposed portion of the photosensitive glass substrate. In addition, the process of changing the thermal expansive coefficient of the microstructure by heat-treating the photosensitive substrate again can be additionally included after etching and removing the unexposed portion.
Inventors:
Seo Jae Cho
Byun Jill Ryu
Byun Jill Ryu
Application Number:
JP2000083593A
Publication Date:
December 24, 2002
Filing Date:
March 24, 2000
Export Citation:
Assignee:
LG Electronics Co., Ltd.
International Classes:
B81C1/00; C03C15/00; C03C23/00; H01J9/02; H01J9/24; H01J11/22; H01J11/34; H01J11/36; (IPC1-7): B81C1/00; H01J9/02; H01J11/02
Domestic Patent References:
| JP9199011A | ||||
| JP5246728A | ||||
| JP9306341A | ||||
| JP4128253A | ||||
| JP3232293A | ||||
| JP1296535A | ||||
| JP2000178036A |
Attorney, Agent or Firm:
Masaki Yamakawa