Title:
【発明の名称】静電容量型圧力センサ
Document Type and Number:
Japanese Patent JP3362197
Kind Code:
B2
Inventors:
Toshihiko Omi
Takuya Nakajima
Takuya Nakajima
Application Number:
JP35545896A
Publication Date:
January 07, 2003
Filing Date:
December 24, 1996
Export Citation:
Assignee:
Omron Corporation
International Classes:
G01L13/06; G01L9/00; H01L29/84; (IPC1-7): G01L9/00; H01L29/84
Domestic Patent References:
| JP7280684A | ||||
| JP8186377A |
Attorney, Agent or Firm:
Shinichi Matsui