Title:
【発明の名称】ロット供給システム及びロット供給方法
Document Type and Number:
Japanese Patent JP3365551
Kind Code:
B2
Abstract:
A lot supply system includes a plurality of processing units, a supply unit, a plurality of counters, and a supply controller. The processing units output a lot supply request and perform a predetermined process for a lot supplied to them. The supply unit supplies a lot stored in it to requesting processing units in response to the lot supply request from the processing units. The counters count product lots supplied to the requesting processing units at least in units of the requesting processing units. When counts of the counters reach preset values set in units of the requesting processing units, the supply controller supplies measurement lots stored in advance to the requesting processing unit and initializes counts of the counters. A lot supply method is also disclosed.
Inventors:
Hiroshi Kondo
Application Number:
JP14047899A
Publication Date:
January 14, 2003
Filing Date:
May 20, 1999
Export Citation:
Assignee:
NEC
International Classes:
H01L21/677; B65G49/07; H01L21/02; H01L21/66; H01L21/68; (IPC1-7): H01L21/02; B65G49/07; H01L21/66; H01L21/68
Domestic Patent References:
| JP5304064A | ||||
| JP9186215A |
Attorney, Agent or Firm:
Johei Yamashita