Title:
【発明の名称】クロム膜のエッチング方法
Document Type and Number:
Japanese Patent JP3366238
Kind Code:
B2
Inventors:
Shusaku Kido
Application Number:
JP29436597A
Publication Date:
January 14, 2003
Filing Date:
October 27, 1997
Export Citation:
Assignee:
Kagoshima NEC Corporation
International Classes:
G02F1/1343; C23F1/26; G03F7/40; H01J9/02; H01L21/306; (IPC1-7): C23F1/26; G02F1/1343; G03F7/40; H01J9/02; H01L21/306
Domestic Patent References:
| JP6208987A | ||||
| JP9263974A | ||||
| JP77757B2 |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)