Title:
【発明の名称】照明光学装置、露光装置、及び該露光装置を用いた転写方法
Document Type and Number:
Japanese Patent JP3367569
Kind Code:
B2
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Inventors:
Osamu Yatsu
Takashi Mori
Takashi Mori
Application Number:
JP27993993A
Publication Date:
January 14, 2003
Filing Date:
November 09, 1993
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03B27/32; G03B27/54; G03F7/20; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03B27/32; G03B27/54; G03F7/20
Domestic Patent References:
| JP60232552A | ||||
| JP697047A |
Attorney, Agent or Firm:
Yoshihiro Fujimoto