Title:
【発明の名称】ウェハの搬送方法
Document Type and Number:
Japanese Patent JP3371002
Kind Code:
B2
Inventors:
Takashi Kametani
Masuo Amma
Shohei Kanno
Masuo Amma
Shohei Kanno
Application Number:
JP27188992A
Publication Date:
January 27, 2003
Filing Date:
October 09, 1992
Export Citation:
Assignee:
Topcon Co., Ltd.
International Classes:
B65G1/07; B65G1/00; B65G1/137; B65G49/07; H01L21/677; H01L21/68; (IPC1-7): B65G1/07; B65G49/07; H01L21/68
Domestic Patent References:
| JP3141545A | ||||
| JP1209737A | ||||
| JP60182727A |
Attorney, Agent or Firm:
Hiroshi Dobashi