Title:
【発明の名称】制御装置
Document Type and Number:
Japanese Patent JP3372635
Kind Code:
B2
Abstract:
Provided is high-performance H INFINITY control technology suitable for position control or speed control of semiconductor exposure apparatus, servo writer of hard disk, etc. A series compensator in the classical control technology represented by the PID compensator is employed as a frequency weight of loop shaping, whereby the design technology in the conventional classical control can be succeeded to and a high-performance control system can be realized even for cases where there is an oscillation mode of a controlled object to become a problem on control performance in the servo band, which was difficult to realize by the classical control technology. Also, using a robust stabilizing compensator obtained from a generalized plant having constant matrix weights, a high-performance control system can be realized even for cases where there is an oscillation mode of the controlled object to become a problem on control performance in the servo band, which was difficult to realize by the conventional classical control technology.
Inventors:
Mikio Sato
Application Number:
JP4245894A
Publication Date:
February 04, 2003
Filing Date:
March 14, 1994
Export Citation:
Assignee:
Canon Inc
International Classes:
G05B13/02; G03F7/20; G05B5/01; G05B13/04; G05B19/19; G05D3/12; (IPC1-7): G05B13/02; G05B13/04; G05D3/12
Domestic Patent References:
| JP4118703A | ||||
| JP60218105A | ||||
| JP6280704A | ||||
| JP63129875A |
Other References:
川谷 亮治、他１名，正規化規約分解表現に基づき橋梁のロバスト制振制御，システム制御情報学会論文誌，日本，システム制御情報学会，１９９３年１月１５日，第３７巻，第１号，ｐ．４８−５６
Attorney, Agent or Firm:
Keizo Nishiyama (1 person outside)