Title:
【発明の名称】膜形成方法および膜形成装置
Document Type and Number:
Japanese Patent JP3372904
Kind Code:
B2
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Inventors:
Nobuyuki Nakahara
Application Number:
JP20131199A
Publication Date:
February 04, 2003
Filing Date:
July 15, 1999
Export Citation:
Assignee:
Canon Inc
International Classes:
C23C26/00; (IPC1-7): C23C26/00
Attorney, Agent or Firm:
Keisuke Watanabe (1 person outside)