Title:
【発明の名称】ヘリウム液化装置の制御方法及び装置
Document Type and Number:
Japanese Patent JP3375906
Kind Code:
B2
Inventors:
Yuji Matsubara
Application Number:
JP8300699A
Publication Date:
February 10, 2003
Filing Date:
March 26, 1999
Export Citation:
Assignee:
Sumitomo Heavy Industries Ltd.
International Classes:
F25B9/00; F25B9/02; (IPC1-7): F25B9/02
Domestic Patent References:
| JP8121892A | ||||
| JP6323663A | ||||
| JP11325630A |
Attorney, Agent or Firm:
Satoshi Takaya (2 outside)