Title:
【発明の名称】荷電粒子ビーム露光方法
Document Type and Number:
Japanese Patent JP3377855
Kind Code:
B2
Inventors:
Akio Yamada
Takashi Kiuchi
Takashi Kiuchi
Application Number:
JP7228694A
Publication Date:
February 17, 2003
Filing Date:
April 11, 1994
Export Citation:
Assignee:
富士通株式会社
International Classes:
H01L21/027; (IPC1-7): H01L21/027
Domestic Patent References:
| JP6275496A | ||||
| JP3153015A | ||||
| JP5114545A | ||||
| JP396219A | ||||
| JP59135727A | ||||
| JP6477937A |
Attorney, Agent or Firm:
Shinkichi Matsumoto