Title:
【発明の名称】洗浄装置、洗浄方法および液晶装置の製造方法
Document Type and Number:
Japanese Patent JP3379512
Kind Code:
B2
Abstract:
A cleaning apparatus includes cleaning vessels 2a and 2b for storing cleaning water "W1" used for cleaning an article to be cleaned 14; concentrating vessels 3a and 3b for storing sewage "W2" discharged from the cleaning vessels; an ultrafiltration membrane 11 for receiving the sewage "W2" discharged from the concentrating vessels to separate the received sewage into filtered water "W3" and concentrated sewage "W5"; and waterway lines "L4" and "L12" for returning the concentrated sewage "W5" discharged from the ultrafiltration membrane 11 to the concentrating vessels 3a and 3b. The filth is removed from the article to be cleaned 14 by dipping the article to be cleaned 14 into the cleaning water "W1". The ultrafiltration membrane 11 is provided with a backwash filtration system "L9", "B4", and "P3" for removing filthy refuse.
Inventors:
Keiichi Suehiro
Kenji Masuda
Kenji Masuda
Application Number:
JP2000139892A
Publication Date:
February 24, 2003
Filing Date:
May 12, 2000
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
B01D61/14; B01D65/02; B08B3/12; B08B3/14; C02F1/44; G02F1/13; C03C23/00; C23G1/36; (IPC1-7): B08B3/12; B01D61/14; B08B3/14; G02F1/13
Domestic Patent References:
| JP639375A | ||||
| JP60102905A | ||||
| JP10109074A |
Attorney, Agent or Firm:
Masanori Ueyanagi (1 outside)