Title:
【発明の名称】固定回転軸線を中心として回転するガス摩擦センサを有するガス摩擦真空計
Document Type and Number:
Japanese Patent JP3421951
Kind Code:
B2
Abstract:
PCT No. PCT/DE94/01482 Sec. 371 Date Jun. 19, 1996 Sec. 102(e) Date Jun. 19, 1996 PCT Filed Dec. 14, 1994 PCT Pub. No. WO95/17654 PCT Pub. Date Jun. 29, 1995A gas-friction vacuum meter has, in addition to the magnetic system for contactlessly suspending the gas sensor, a device for measuring the actual inclination of the rotation axis of that sensor and corrects the measured value for the inclination by comparison of the output signal of this device with an Eddy-current conditioned braking value obtained for a certain inclination angle of the rotation axis.
Inventors:
Lindenau Bernd
Flemery Johann Kerr
Witthower Claus
Flemery Johann Kerr
Witthower Claus
Application Number:
JP51708795A
Publication Date:
June 30, 2003
Filing Date:
December 14, 1994
Export Citation:
Assignee:
Forschungszentrum Jürich Gesellschaft Mito Beschlenktel Haftung
International Classes:
G01L21/16; G01L21/24; (IPC1-7): G01L21/16
Domestic Patent References:
| JP6288854A | ||||
| JP6161030A | ||||
| JP5717831A |
Attorney, Agent or Firm:
Mitsufumi Ezaki (3 others)