Title:
【発明の名称】移動表面の自動的な検査のための方法及び装置
Document Type and Number:
Japanese Patent JP3423688
Kind Code:
B2
Abstract:
In a method and an apparatus for automatic inspection of moving surfaces the surface (S) to be inspected is observed under a first observation condition by means of a first illumination/observation channel to obtain a first signal (R), and the surface (S) is observed under a second observation condition by means of a second and a third illumination/observation channel to obtain a second signal (G) and a third signal (B), and from the first, second and third signals (R, G, B) informations on the physical properties of the surface (S) is derived.
Inventors:
Detlef Paul
Pertti Contio
Timo Piironen
Ali Herkenen
Martti Caruppinen
Pertti Contio
Timo Piironen
Ali Herkenen
Martti Caruppinen
Application Number:
JP2000507998A
Publication Date:
July 07, 2003
Filing Date:
July 21, 1998
Export Citation:
Assignee:
Spectra-Physics Visiontech Oy
International Classes:
G01N21/27; G01N21/57; G01N21/89; (IPC1-7): G01N21/57; G01N21/27; G01N21/89
Domestic Patent References:
| JP63176825A | ||||
| JP6123004A | ||||
| JP6129844A | ||||
| JP674727A | ||||
| JP658731A | ||||
| JP5332739A | ||||
| JP4105045A | ||||
| JP2216407A | ||||
| JP2141604A | ||||
| JP1187437A |
Other References:
【文献】独国特許出願公開19511534(DE,A1)
Attorney, Agent or Firm:
Shigeo Noguchi