Title:
【発明の名称】化学気相成長法によって薄膜を製造する方法と装置
Document Type and Number:
Japanese Patent JP3462852
Kind Code:
B2
Abstract:
A venturi mist generator creates a mist comprising droplets having a mean diameter less than one micron from liquid precursors containing multi-metal polyalkoxide compounds. The mist is mixed and then passed into a gasifier where the mist droplets are gasified at a temperature of between 100° C. and 250° C., which is lower than the temperature at which the precursor compounds decompose. The gasified precursor compounds are transported by carrier gas through insulated tubing at ambient temperature to prevent both condensation and premature decomposition. The gasified precursors are mixed with oxidant gas, and the gaseous reactant mixture is injected through a showerhead inlet into a deposition reactor in which a substrate is heated at a temperature of from 300° C. to 600 ° C. The gasified precursors decompose at the substrate and form a thin film of solid material on the substrate. The thin film is treated at elevated temperatures of from 500° C. to 900° C. to form polycrystalline metal oxide material, in particular, ferroelectric layered superlattice material.
Inventors:
Pas de Arajo, Carlos A.
Larry Dee, Macmillan
Sorayapang, Narayan
Jeffrey W. Bacon
Larry Dee, Macmillan
Sorayapang, Narayan
Jeffrey W. Bacon
Application Number:
JP2000502245A
Publication Date:
November 05, 2003
Filing Date:
July 14, 1998
Export Citation:
Assignee:
SYMETRIX CORPORATION
International Classes:
B05D1/00; B05D1/04; C23C16/40; C23C16/448; C23C16/455; H01L21/31; H01L21/316; C23C16/44; H01L21/02; H01L21/314; (IPC1-7): H01L21/316; C23C16/40; H01L21/31
Domestic Patent References:
| JP5239652A | ||||
| JP925578A | ||||
| JP38330A | ||||
| JP9504500A |
Attorney, Agent or Firm:
Kazuo Shamoto (5 outside)