【発明の名称】ガスによって駆動される回転する基板を備えた急速熱処理(RTP)システム - Steak Ertepe Systems Gezel Shaft Mitt Beschlenktel Haftung

Title:

【発明の名称】ガスによって駆動される回転する基板を備えた急速熱処理(RTP)システム

Document Type and Number:

Japanese Patent JP3507796

Kind Code:

B2

Abstract:

An apparatus, method, and system for Rapid Thermal Processing (RTP), whereby the object to be processed is rotated under the radiation sources of the RTP system by a gas jet system, is presented.

Inventors:

Helmut Ashner
Andreas Hauke
Ulrich Valk
Dieter Zell Nickel

Application Number:

JP2000522611A

Publication Date:

March 15, 2004

Filing Date:

November 18, 1998

Export Citation:

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Assignee:

Steak Ertepe Systems Gezel Shaft Mitt Beschlenktel Haftung

International Classes:

H01L21/205; C23C16/458; C23C16/48; C30B31/12; C30B31/14; H01L21/00; H01L21/26; H01L21/683; (IPC1-7): H01L21/26; H01L21/205

Domestic Patent References:

JP3159225A
JP766142A
JP8130189A
JP425122A
JP6310438A
JP62230982A
JP59222922A
JP59215718A
JP6170935U

Other References:

Ｐ．Ｍ．ＦＲＩＪＬＩＮＫ，”ＡＮＥＷＶＥＲＳＡＴＩＬＥ，ＬＡＲＧＥＳＩＺＥＭＯＶＰＥＲＥＡＣＴＯＲ”，ＪｏｕｒｎａｌｏｆＣｒｙｓｔａｌＧｒｏｗｔｈ，１９８８年，ＶＯＬ．９３，ｐｐ．２０７−２１５

Attorney, Agent or Firm:

Toshio Yano (3 outside)

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