Title:
ArFエキシマレーザ装置
Document Type and Number:
Japanese Patent JP3552979
Kind Code:
B2
Abstract:
The oscillation pulse width is extended in a gas laser apparatus emitting ultraviolet radiation by a high-repetition rate oscillating operation. The gas laser apparatus has a pair of laser discharge electrodes (3, 4) connected to the output terminals of a magnetic pulse compression circuit and disposed in a laser chamber (1). The pulse width is extended by determining circuit constants so that the period of the oscillating current flowing between the discharge electrodes is shortened and, at the same time, the peak value of the current is increased, whereby the laser gas is continuously excited even during at least one half-cycle subsequent to the first half-cycle of the oscillating current to sustain the laser oscillating operation.
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Inventors:
Koji Kakizaki
Takashi Saito
Hidenori Watanabe
Takashi Saito
Hidenori Watanabe
Application Number:
JP2000021581A
Publication Date:
August 11, 2004
Filing Date:
January 31, 2000
Export Citation:
Assignee:
Ushio, Inc.
International Classes:
H01S3/097; H01S3/02; H01S3/0971; H01S3/225; H01S3/038; (IPC1-7): H01S3/097; H01S3/225
Domestic Patent References:
| JP3427889B2 | ||||
| JP11145794A | ||||
| JP11177168A | ||||
| JP11163447A | ||||
| JP4171879A | ||||
| JP10012950A | ||||
| JP4307718A | ||||
| JP4105379A | ||||
| JP63110780A | ||||
| JP62190786A | ||||
| JP62190785A |
Other References:
L.Feenstra et al.,Applied Physics Letters,Vol.75, No.8, pp.1033-1035 (August 1999)
Attorney, Agent or Firm:
Hiroshi Nagisawa
Ryukichi Abe
Hirukawa Masanobu
Hiroki Shirai
Norihiko Uchida
Hideo Sugai
Kenji Aoki
Akira Yonezawa
Ryukichi Abe
Hirukawa Masanobu
Hiroki Shirai
Norihiko Uchida
Hideo Sugai
Kenji Aoki
Akira Yonezawa