Title:
3族窒化物半導体の電極及びその電極を有した素子
Document Type and Number:
Japanese Patent JP3557791
Kind Code:
B2
Inventors:
Masayoshi Koike
Junichi Umezaki
Norikatsu Koide
Shinya Asami
Shiro Yamasaki
Masaki Murakami
Yasuo Koide
Junichi Umezaki
Norikatsu Koide
Shinya Asami
Shiro Yamasaki
Masaki Murakami
Yasuo Koide
Application Number:
JP17855596A
Publication Date:
August 25, 2004
Filing Date:
June 18, 1996
Export Citation:
Assignee:
Toyoda Gosei Co., Ltd.
International Classes:
H01L21/28; H01L29/45; H01L33/32; H01L33/40; H01L33/62; H01S5/00; H01S5/323; (IPC1-7): H01L21/28; H01L33/00; H01S5/323
Domestic Patent References:
| JP8032115A | ||||
| JP9069623A | ||||
| JP8504298A |
Attorney, Agent or Firm:
Osamu Fujitani