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Title:
電子ビーム照射装置
Document Type and Number:
Japanese Patent JP3557979
Kind Code:
B2
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Inventors:
Masanori Yamaguchi
Application Number:
JP2000001058A
Publication Date:
August 25, 2004
Filing Date:
January 06, 2000
Export Citation:
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Assignee:
Ushio, Inc.
International Classes:
G21K5/04; (IPC1-7): G21K5/04
Domestic Patent References:
JP51143084A
JP50030555Y1
Attorney, Agent or Firm:
Kenjiro Take
Koji Shichijo



 
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