金属薄膜及びその製造方法

Title:

金属薄膜及びその製造方法

Document Type and Number:

Japanese Patent JP3559290

Kind Code:

B2

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Inventors:

Yoshiro Akagi
Yasunari Okamoto
Shigeru Uenishi

Application Number:

JP8566991A

Publication Date:

August 25, 2004

Filing Date:

April 18, 1991

Export Citation:

Assignee:

Sharp Corporation

International Classes:

C23C14/06; C22C27/02; C23C14/14; H01L21/203; H01L21/3205; H01L23/52; (IPC1-7): H01L21/3205; C22C27/02; C23C14/06; H01L21/203

Domestic Patent References:

Attorney, Agent or Firm:

Takaya Koike
Masaharu Kinoshita

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