Title:
回折光学素子及びそれを用いた走査光学装置
Document Type and Number:
Japanese Patent JP3559710
Kind Code:
B2
Abstract:
Diffraction optical element (62) used in a scanning optical apparatus as a scanning optical element has a diffraction grating (11) formed on a substrate (22). The diffraction grating has a profile comprising tilted portions (31) for generating a diffractive power and wall portions (32) connecting the end portions of the tilt portions (31a) to the substrate. The wall portion is tilted within a predetermined range with respect to a normal of the substrate surface. The tilt angle of the wall portion of the diffraction grating with respect to the normal of the substrate continuously changes to increase as a distance away from an optical axis of the diffraction optical element becomes large.
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Inventors:
Gaku Kato
Application Number:
JP15995698A
Publication Date:
September 02, 2004
Filing Date:
May 25, 1998
Export Citation:
Assignee:
Canon Inc
International Classes:
B41J2/44; G02B5/18; G02B13/00; G02B26/10; G02B26/12; G02B27/00; H04N1/113; (IPC1-7): G02B26/10; B41J2/44; G02B5/18; H04N1/113
Attorney, Agent or Firm:
Yukio Takanashi