Title:
プラズマ処理装置及びそのメンテナンス方法
Document Type and Number:
Japanese Patent JP3559760
Kind Code:
B2
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Inventors:
Toshio Masuda
Masanori Katsuyama
Mitsuru Suehiro
Hiroshi Kanekiyo
Hideyuki Yamamoto
Masanori Katsuyama
Mitsuru Suehiro
Hiroshi Kanekiyo
Hideyuki Yamamoto
Application Number:
JP2000293002A
Publication Date:
September 02, 2004
Filing Date:
September 26, 2000
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
H05H1/46; C23C16/509; C23F4/00; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): H01L21/3065; H01L21/205; H05H1/46
Domestic Patent References:
| JP10172794A | ||||
| JP59033777A | ||||
| JP61049985A | ||||
| JP10172794A | ||||
| JP59033777A | ||||
| JP61049985A |
Attorney, Agent or Firm:
Katsuo Ogawa
Kyosuke Tanaka
Kyosuke Tanaka