Title:
透明材料内部の処理方法およびその装置
Document Type and Number:
Japanese Patent JP3559827
Kind Code:
B2
Abstract:
A shape with a substantially perfect circle is obtained as a processed shape such as a modified shape or a worked shape at a light focus point in a cross-section in a direction parallel to an advance direction of a femtosecond laser light beam. A section in a direction perpendicular to an advance direction of a laser light beam emitted from a femtosecond laser (10) is formed in a predetermined shaped. The laser light of which sectional shape in the direction perpendicular to the advance direction is formed in the predetermined shape is entered into a lens (14). The light is focused by the lens inside a transparent material (100) and processes the inside of the transparent material.
Inventors:
Koji Sugioka
Chen Ya
Katsumi Midorikawa
Chen Ya
Katsumi Midorikawa
Application Number:
JP2002149931A
Publication Date:
September 02, 2004
Filing Date:
May 24, 2002
Export Citation:
Assignee:
RIKEN
International Classes:
B23K26/064; B23K26/00; B23K26/06; B23K26/073; B23K26/40; C03C23/00; G02B6/13; G02B6/136; (IPC1-7): B23K26/00; B23K26/06
Domestic Patent References:
| JP2001212680A | ||||
| JP2001276985A | ||||
| JP11269683A |
Other References:
三浦清貴・平尾一之,フェムト秒レーザー照射によるガラス内部への光誘起構造形成,レーザ熱加工研究会論文集,日本,レーザ熱加工研究会,1997年11月,第42回,P.105-111
Ya Cheng,Koji Sugioka et al.,3D microstructuring inside Foturan glass by femtosecond laser,RIKEN Review,日本,RIKEN,2003年 1月,No.50,p.101-106
Ya Cheng,Koji Sugioka et al.,3D microstructuring inside Foturan glass by femtosecond laser,RIKEN Review,日本,RIKEN,2003年 1月,No.50,p.101-106
Attorney, Agent or Firm:
Junichi Ueshima