Title:
ターボ分子ポンプ
Document Type and Number:
Japanese Patent JP3561774
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a turbo molecular pump in which a touchdown phenomenon is difficult to occur at the time of leak of atmosphere. SOLUTION: A rotor 4 is supported in a casing 3 by plural sets of control type magnetic bearings 13, 14, 15 in non-contact manner, and is rotated by an electric motor 16. An air inlet port 5 is provided at the casing 3. Plural exhaust ports 7a, 7b are provided in positions in which the outer peripheral part of the casing 3 is circumferentially equally divided.
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Inventors:
Atsushi Kubo
Application Number:
JP29514598A
Publication Date:
September 02, 2004
Filing Date:
October 16, 1998
Export Citation:
Assignee:
Koyo Seiko Co., Ltd.
International Classes:
F04D19/04; F04D29/54; (IPC1-7): F04D19/04
Domestic Patent References:
| JP2000027789A | ||||
| JP6012794U | ||||
| JP6147185A | ||||
| JP10274188A | ||||
| JP6185495A | ||||
| JP7217587A | ||||
| JP60034594U |
Attorney, Agent or Firm:
Einosuke Kishimoto
Moriichi Kishimoto
Akira Watanabe
Norihiko Hibi
Kiyosue Yasuko
Moriichi Kishimoto
Akira Watanabe
Norihiko Hibi
Kiyosue Yasuko