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Patent Searching and Data


Title:
照明装置及びそれを用いた投影露光装置
Document Type and Number:
Japanese Patent JP3563888
Kind Code:
B2
Inventors:
溝内 聡
Application Number:
JP26359496A
Publication Date:
September 08, 2004
Filing Date:
September 12, 1996
Export Citation:
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Assignee:
キヤノン株式会社
International Classes:
G02B27/00; G03F7/20; H01L21/027; (IPC1-7): H01L21/027; G02B27/00; G03F7/20
Domestic Patent References:
JP6310396A
JP4305601A
JP7230949A
JP62092913A
Attorney, Agent or Firm:
高梨 幸雄