Title:
塗布装置
Document Type and Number:
Japanese Patent JP3568838
Kind Code:
B2
Inventors:
Masahiro Nakamura
Takuya Yokoyama
Tsutomu Ueyama
Iseki Ide
Katsuyuki Machida
Kuraki 100 million
Takuya Yokoyama
Tsutomu Ueyama
Iseki Ide
Katsuyuki Machida
Kuraki 100 million
Application Number:
JP28136299A
Publication Date:
September 22, 2004
Filing Date:
October 01, 1999
Export Citation:
Assignee:
Chugai Furnace Industry Co., Ltd.
Dainippon Screen Mfg. Co., Ltd.
Nippon Telegraph and Telephone Corporation
Dainippon Screen Mfg. Co., Ltd.
Nippon Telegraph and Telephone Corporation
International Classes:
B05C5/02; B05C13/02; G03F7/16; (IPC1-7): B05C5/02; B05C13/02; G03F7/16
Domestic Patent References:
| JP61291063A | ||||
| JP3079872U |
Attorney, Agent or Firm:
Aoyama Aoi
Yasumichi Furukawa
Atsushi Maeda
Hiroshi Kano
Yoshiyuki Maebori
Yasumichi Furukawa
Atsushi Maeda
Hiroshi Kano
Yoshiyuki Maebori