Title:
位置合わせ方法および装置
Document Type and Number:
Japanese Patent JP3571874
Kind Code:
B2
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Inventors:
Shin Takakura
Shigeyuki Uzawa
Shigeyuki Uzawa
Application Number:
JP17914297A
Publication Date:
September 29, 2004
Filing Date:
June 20, 1997
Export Citation:
Assignee:
Canon Inc
International Classes:
H01L21/68; H01L21/027; (IPC1-7): H01L21/027; H01L21/68
Domestic Patent References:
| JP9007929A | ||||
| JP8097114A | ||||
| JP7307269A | ||||
| JP7037770A | ||||
| JP6252027A | ||||
| JP6232028A | ||||
| JP6224103A |
Attorney, Agent or Firm:
Tetsuya Ito