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Patent Searching and Data


Title:
高性能ターボ分子真空ポンプ
Document Type and Number:
Japanese Patent JP3584305
Kind Code:
B2
Inventors:
マーズベッド・ハブラニアン
Application Number:
JP12825193A
Publication Date:
November 04, 2004
Filing Date:
April 30, 1993
Export Citation:
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Assignee:
バリアン・インコーポレイテッド
Varian, Incorporated
International Classes:
F04D1/06; F04D17/12; F04D17/16; F04D19/04; F04D23/00; F04D29/54; (IPC1-7): F04D19/04; F04D23/00
Domestic Patent References:
JP2163496A
JP2078793A
JP52169109U
JP3182697A
JP52020413A
Attorney, Agent or Firm:
竹内 澄夫
堀 明▲ひこ▼