Title:
位置決め方法
Document Type and Number:
Japanese Patent JP3590916
Kind Code:
B2
Inventors:
Kenji Nishi
Application Number:
JP34324795A
Publication Date:
November 17, 2004
Filing Date:
December 28, 1995
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F9/00; H01L21/027; H01L21/68; (IPC1-7): H01L21/027; G03F9/00; H01L21/68
Domestic Patent References:
| JP7074084A | ||||
| JP6045226A | ||||
| JP59117120A | ||||
| JP2142158A |
Attorney, Agent or Firm:
Satoshi Omori