合成石英ガラス製造装置

Title:

合成石英ガラス製造装置

Document Type and Number:

Japanese Patent JP3591540

Kind Code:

B2

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Inventors:

Shoji Yajima
Kazuhiro Nakagawa
Hiroyuki Hiraiwa

Application Number:

JP23739794A

Publication Date:

November 24, 2004

Filing Date:

September 30, 1994

Export Citation:

Assignee:

NIKON CORPORATION

International Classes:

C03B8/04; C03B19/14; C03B20/00; (IPC1-7): C03B8/04; C03B20/00

Domestic Patent References:

Previous Patent: 照明器具

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