Title:
エネルギービームによる加工方法
Document Type and Number:
Japanese Patent JP3591975
Kind Code:
B2
Inventors:
Masanori Hatakeyama
Katsunori Ichiki
Takao Kato
Yotaro Hatamura
Masayuki Nakao
Katsunori Ichiki
Takao Kato
Yotaro Hatamura
Masayuki Nakao
Application Number:
JP8207796A
Publication Date:
November 24, 2004
Filing Date:
March 11, 1996
Export Citation:
Assignee:
Ebara Corporation
Yotaro Hatamura
Yotaro Hatamura
International Classes:
G21K5/04; B23K15/00; B23K17/00; B23K26/066; B81C99/00; G03F7/20; H05H3/02; (IPC1-7): B81C5/00; B23K17/00
Domestic Patent References:
| JP3123900A | ||||
| JP6264272A | ||||
| JP62201444A | ||||
| JP4127980A | ||||
| JP6079874A |
Attorney, Agent or Firm:
Isamu Watanabe
Shintaro Hotta
Shintaro Hotta