Title:
基板処理装置
Document Type and Number:
Japanese Patent JP3592771
Kind Code:
B2
Inventors:
福▲富▼ 義光
Shigeru Sasada
Hidekazu Inoue
Kaoru Aoki
Kenji Sugimoto
Mitsumasa Kodama
Shigeru Sasada
Hidekazu Inoue
Kaoru Aoki
Kenji Sugimoto
Mitsumasa Kodama
Application Number:
JP30348894A
Publication Date:
November 24, 2004
Filing Date:
December 07, 1994
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G02F1/1333; B05C11/08; B23Q7/14; B23Q41/00; G03B27/32; H01L21/02; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B05C11/08; B23Q7/14; B23Q41/00; G02F1/1333; G03B27/32; H01L21/02
Domestic Patent References:
| JP6338555A | ||||
| JP6084819A | ||||
| JP1209737A | ||||
| JP1241840A | ||||
| JP4305914A |
Attorney, Agent or Firm:
Shigeaki Yoshida
Yoshitake Hidetoshi
Takahiro Arita
Yoshitake Hidetoshi
Takahiro Arita