塗布現像処理装置 - 東京エレクトロン株式会社

Title:

塗布現像処理装置

Document Type and Number:

Japanese Patent JP3593496

Kind Code:

B2

Inventors:

Hiroharu Hashiguchi
Koji Okamura

Application Number:

JP2000222228A

Publication Date:

November 24, 2004

Filing Date:

July 24, 2000

Export Citation:

Assignee:

東京エレクトロン株式会社

International Classes:

G03F7/30; H01L21/027; H01L21/677; H01L21/68; (IPC1-7): H01L21/027; G03F7/30; H01L21/68

Domestic Patent References:

Attorney, Agent or Firm:

Tetsuo Kanamoto
Miaki Kametani
Koji Hagiwara

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