Title:
半導体装置の製造方法
Document Type and Number:
Japanese Patent JP3601232
Kind Code:
B2
Inventors:
角 ▲博▼文
Atsushi Suenaga
Kazuhiro Tajima
Yutaka Okamoto
Atsushi Horiuchi
Atsushi Suenaga
Kazuhiro Tajima
Yutaka Okamoto
Atsushi Horiuchi
Application Number:
JP3453197A
Publication Date:
December 15, 2004
Filing Date:
February 19, 1997
Export Citation:
Assignee:
ソニー株式会社
International Classes:
H01L21/28; H01L21/265; H01L21/336; H01L21/768; H01L29/78; (IPC1-7): H01L21/336; H01L21/265; H01L21/28; H01L21/768; H01L29/78
Domestic Patent References:
| JP9008148A | ||||
| JP7231091A | ||||
| JP7273321A | ||||
| JP5190566A | ||||
| JP8306802A | ||||
| JP5315608A |
Attorney, Agent or Firm:
Funabashi Kuninori