Title:
誘電体分離ウェーハおよびその製造方法
Document Type and Number:
Japanese Patent JP3601763
Kind Code:
B2
Inventors:
Hiroyuki Oi
Application Number:
JP35969398A
Publication Date:
December 15, 2004
Filing Date:
December 17, 1998
Export Citation:
Assignee:
Mitsubishi Sumitomo Silicon Co., Ltd.
International Classes:
H01L21/76; H01L21/02; H01L21/205; H01L21/316; H01L21/762; H01L27/12; (IPC1-7): H01L21/76; H01L21/762
Domestic Patent References:
| JP50081292A | ||||
| JP8186167A |
Attorney, Agent or Firm:
Ichiro Abe