Title:
蛍光X線分析システムおよびそれに用いるプログラム
Document Type and Number:
Japanese Patent JP3603278
Kind Code:
B2
Abstract:
An X-ray fluorescence spectrometric system includes a sample pre-treatment apparatus 10 for retaining on a surface of a substrate a substance to be measured that is found on the surface of the substrate, after such substance has been dissolved and subsequently dried, an X-ray fluorescence spectrometer 40, and a transport apparatus 50 for transporting the substrate from the sample pre-treatment apparatus towards the X-ray fluorescence spectrometer, which system as a whole is easy to operate. This spectrometric system also includes a control apparatus 50 for controlling the sample pre-treatment apparatus 10 , the X-ray fluorescence spectrometer 40 and the transport apparatus 50 in a totalized fashion.
Inventors:
Motoyuki Yamagami
Akihiro Ikeshita
Akihiro Ikeshita
Application Number:
JP2001270604A
Publication Date:
December 22, 2004
Filing Date:
September 06, 2001
Export Citation:
Assignee:
Rigaku Denki Kogyo Co., Ltd.
International Classes:
G01N1/00; G01N23/223; (IPC1-7): G01N23/223; G01N1/00
Domestic Patent References:
| JP9072836A | ||||
| JP8086724A | ||||
| JP4299550A | ||||
| JP5259259A | ||||
| JP2000292326A | ||||
| JP6302581A | ||||
| JP7193035A | ||||
| JP5256749A |
Attorney, Agent or Firm:
Shuji Sugimoto
Masashi Noda
Kenro Tsutsumi
Masashi Noda
Kenro Tsutsumi