Title:
AlNメタライズ基板
Document Type and Number:
Japanese Patent JP3606908
Kind Code:
B2
Inventors:
Hideki Sato
Miyashita Kimiya
Miyashita Kimiya
Application Number:
JP15835194A
Publication Date:
January 05, 2005
Filing Date:
July 11, 1994
Export Citation:
Assignee:
Toshiba Corporation
International Classes:
C04B41/90; C04B35/581; H01L23/15; H05K1/03; H05K3/38; (IPC1-7): C04B41/90; C04B35/581; H01L23/15
Domestic Patent References:
| JP6032686A | ||||
| JP1313365A | ||||
| JP5226515A | ||||
| JP5170552A | ||||
| JP3174382A | ||||
| JP63069783A |
Attorney, Agent or Firm:
Saichi Suyama