表面形状欠陥検出方法とその装置

Title:

表面形状欠陥検出方法とその装置

Document Type and Number:

Japanese Patent JP3610730

Kind Code:

B2

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Inventors:

Nomoto Mineo
Yuji Takagi
Takanori Ninomiya

Application Number:

JP16836397A

Publication Date:

January 19, 2005

Filing Date:

June 25, 1997

Export Citation:

Assignee:

株式会社日立製作所

International Classes:

G01B11/02; G01B11/30; G01N21/88; G01N21/95; G01N21/956; (IPC1-7): G01B11/30; G01B11/02; G01N21/95

Domestic Patent References:

JP8272077A
JP6288763A

Attorney, Agent or Firm:

Yasuo Sakuta

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