Title:
半導体装置の製造方法
Document Type and Number:
Japanese Patent JP3616297
Kind Code:
B2
Inventors:
Mitsunari Satake
Shuhei Noguchi
Shuhei Noguchi
Application Number:
JP2000012746A
Publication Date:
February 02, 2005
Filing Date:
January 21, 2000
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H01L21/28; H01L21/302; H01L21/304; H01L21/306; H01L21/3065; H01L21/3205; H01L21/768; H01L23/52; (IPC1-7): H01L21/768; H01L21/28; H01L21/304; H01L21/306; H01L21/3065; H01L21/3205
Domestic Patent References:
| JP9326392A | ||||
| JP10214834A | ||||
| JP10189590A | ||||
| JP2000138224A | ||||
| JP2000049224A | ||||
| JP2001176872A |
Attorney, Agent or Firm:
Akio Miyai