Title:
露光方法
Document Type and Number:
Japanese Patent JP3617046
Kind Code:
B2
Inventors:
Masaharu Kawakubo
Application Number:
JP13013195A
Publication Date:
February 02, 2005
Filing Date:
May 29, 1995
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G03F9/00; H01L21/027; (IPC1-7): H01L21/027; G03F9/00
Domestic Patent References:
| JP8153663A | ||||
| JP4324615A | ||||
| JP2051214A | ||||
| JP8064516A |
Attorney, Agent or Firm:
Satoshi Omori