Title:
半導体装置の製造方法
Document Type and Number:
Japanese Patent JP3619752
Kind Code:
B2
Inventors:
Kinoshita Mitsuru
Satoshi Otaka
Satoshi Otaka
Application Number:
JP2000177439A
Publication Date:
February 16, 2005
Filing Date:
June 13, 2000
Export Citation:
Assignee:
Renesas Technology Corp.
Renesas Northern Japan Semiconductor Co., Ltd.
Renesas Northern Japan Semiconductor Co., Ltd.
International Classes:
H01L23/12; H01L21/60; (IPC1-7): H01L21/60; H01L23/12
Domestic Patent References:
| JP9008172A | ||||
| JP2000517104A | ||||
| JP8046077A | ||||
| JP64073625A |
Attorney, Agent or Firm:
Yamato Tsutsui