Title:
技術的表面における小さな周期的うねりを検出および測定するための装置
Document Type and Number:
Japanese Patent JP3646063
Kind Code:
B2
Abstract:
In a method and apparatus for detecting small periodic wave patterns in technical surfaces, monochromatic coherent primary light is directed onto a workpiece surface approximately at right angles to the expected periodic wave patterns, and at an angle of incidence that grazes the workpiece surface, creating a diffraction image of the waved surface structure in the secondary-light beam. The occurrence of two intensity maxima immediately indicates the presence of a periodic wave pattern, whose period is evaluated through inverse proportionality from the spacing of neighboring intensity maxima, while the depth of the wave troughs is determined from the intensity of neighboring intensity maxima and from the period. The intensity distribution in the diffraction image in the secondary-beam path is subjected to an autocorrelation, and both the period and the depth of the wave pattern can be calculated from the autocorrelation function.
Inventors:
Jörg, Baumgart
Lau, Norbert
Trucken Brod, Horst
Lau, Norbert
Trucken Brod, Horst
Application Number:
JP2000576235A
Publication Date:
May 11, 2005
Filing Date:
September 07, 1999
Export Citation:
Assignee:
BASF AKTIENGESELLSCHAFT
International Classes:
G01B11/30; G01N21/88; G01N21/956; (IPC1-7): G01B11/30
Domestic Patent References:
| JP3295408A | ||||
| JP1292202A | ||||
| JP7159344A |
Foreign References:
| US3850526 | ||||
| US5189490 |
Attorney, Agent or Firm:
Hisako Ishido
Mitsue Haba
Hideo Akazawa
Eiichi Yamaguchi
Mitsue Haba
Hideo Akazawa
Eiichi Yamaguchi